113 學年度第 2 學期材料科學系碩士班邱聖貴教師半導體製程課程大綱

課程簡介 Course Introduction
開課年度學期 Year / Term	113 學年度第 2 學期
開課班級 Department	材料科學系碩士班材碩士合
授課方式 Instructional Method	課堂教學、英語-不加成
課程電腦代號 Course Reference Number	167034
課程名稱(中文) Course Title(Chinese)	半導體製程
課程名稱(英文) Course Title(English)	Semiconductor Manufacturing Technology
學分數/時數 Credit Hours	3 / 3
必(選)修 Requirement / Elective Course	選修
授課老師 Instructor	邱聖貴
助教 Teaching Assistant
上課時間 Meeting Time	星期五，節次3、4、5
上課教室 Classroom	C501
Office Hours

獲獎及補助情形 Awards and Grants

聯合國永續發展目標 (SDGs跨域類別) Sustainable Development Goals, SDGs

SDGs 09.

工業化、創新及基礎建設：建立具有韌性的基礎建設，促進包容且永續的工業，並加速創新

課程目標 Learning Objectives

This course is designed to provide graduate students in the Department of Materials Science with fundamental semiconductor manufacturing knowledge and principles of semiconductor processing. Students deepen their understanding of core chemical and physical concepts and apply them to understand the preparation, characterization, and process control of semiconductor materials. It is expected that students will have a solid theoretical foundation in their future research and be able to flexibly apply chemical knowledge in research related to the semiconductor field.

先修 ( 前置 ) 課程 Prerequisite

彈性教學規劃 Flexible Teaching/Planning Schedules

＊本課程實施16+2週彈性教學方案，其中第17、18週之彈性規劃如下：

線上教學/討論

課程大綱 Course Syllabus
週次 Week	課程單元大綱 Unit	教學方式 Instructional Method/Style/Teaching Style	參考資料或相關作業 References or Related Materials	評量方式 Grading
1	Introduction of semiconductor manufacturing process	Presentation/Discussion	Scientific Papers/PPT slide	Quizzes, Discussion, and Attendance
2	Introduction of semiconductor manufacturing process	Presentation/Discussion	Scientific Papers/PPT slide	Quizzes, Discussion, and Attendance
3	Wafer Preparation	Presentation/Discussion	Scientific Papers/PPT slide	Quizzes, Discussion, and Attendance
4	Wafer Preparation	Presentation/Discussion	Scientific Papers/PPT slide	Quizzes, Discussion, and Attendance
5	Thermal Oxidation	Presentation/Discussion	Scientific Papers/PPT slide	Quizzes, Discussion, and Attendance
6	Photolithography	Presentation/Discussion	Scientific Papers/PPT slide	Quizzes, Discussion, and Attendance
7	Photolithography	Presentation/Discussion	Scientific Papers/PPT slide	Quizzes, Discussion, and Attendance
8	Midterm exam	Exam	Exam	Exam
9	Wet Etching	Presentation/Discussion	Scientific Papers/PPT slide	Quizzes, Discussion, and Attendance
10	Dry Etching	Presentation/Discussion	Scientific Papers/PPT slide	Quizzes, Discussion, and Attendance
11	Thin Film Deposition	Presentation/Discussion	Scientific Papers/PPT slide	Quizzes, Discussion, and Attendance
12	Thin Film Deposition	Presentation/Discussion	Scientific Papers/PPT slide	Quizzes, Discussion, and Attendance
13	Metallization	Presentation/Discussion	Scientific Papers/PPT slide	Quizzes, Discussion, and Attendance
14	Chemical Mechanical Polishing	Presentation/Discussion	Scientific Papers/PPT slide	Quizzes, Discussion, and Attendance
15	Chemical Mechanical Polishing	Presentation/Discussion	Scientific Papers/PPT slide	Quizzes, Discussion, and Attendance
16	Final Exam	Exam	Exam	Exam
17	Self-learning	Self-learning	Scientific Papers	Self-evaluation
18	Self-learning	Self-learning	Scientific Papers	Self-evaluation

單一課程對應校能力指標程度 The Degree to Which Single Course Corresponds to School Competence
編號 No.	校核心能力 School Core Competencies	符合程度 Degree of conformity

單一課程對應系能力指標程度 The Degree to Which Single Course Corresponds to Department Competence
編號 No.	類別 Category	系核心能力 Department Core Competencies	符合程度 Degree of conformity
01	系所	具備基礎科學概念	0
02	系所	具備材料專業知識與技能	0
03	系所	能獨立從事材料相關研究，具實作、分析、總結實驗的能力	0
04	系所	具備閱讀英文科學論文，並做出適切評論的能力	0
05	系所	具備中英文科學寫作與發表的能力	0
06	系所	具備有效溝通與團隊合作的能力	0
07	系所	能理解專業及社會義務與責任	0

單一課程對應院能力指標程度 The Degree to Which Single Course Corresponds to College Competence
編號 No.	院核心能力 College Core Competencies	符合程度 Degree of conformity

教科書或參考用書 Textbooks or Reference Books

館藏書名 Library Books

備註 Remarks

※請尊重智慧財產權，不得非法影印教科書※

※ Please respect intellectual property rights and do not illegally photocopy textbooks. ※

教學方法 Teaching Method
教學方法 Teaching Method	百分比 Percentage
講述	70 %
分享	30 %
總和 Total	100 %

成績評量方式 Grading
評量方式 Grading	百分比 Percentage
出席狀況	15 %
期中考	30 %
期末考	30 %
個人口頭報告	25 %
總和 Total	100 %

成績評量方式補充說明

課程大綱補充資料 Supplementary Material of Course Syllabus